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专利名称：Defect detection apparatus and defect
detection method
发明人：Yoshinari Ota申请号：US12069510申请日：20080211
公开号：US20080226156A1公开日：20080918
专利附图：
摘要：A primary defect detecting section performs a primary defect detectionprocess for detecting a severe defect of more than a predetermined size on aninspection object. A secondary defect detecting section performs a secondary defect
detection process for detecting a defect on the inspection object using image data of theinspection object. A process controller omits the secondary defect detection processupon detection of the severe defect in the primary defect detection process beforestarting the secondary defect detection process, or stops the secondary defectdetection process upon detection of the severe defect in the primary defect detectionprocess after starting the secondary defect detection process.
申请人：Yoshinari Ota
地址：Tokyo JP
国籍：JP
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